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1 article(s) from Liedtke, Susann

Comparative study of sculptured metallic thin films deposited by oblique angle deposition at different temperatures

Susann Liedtke,
Christoph Grüner,
Jürgen W. Gerlach and
Bernd Rauschenbach

Beilstein J. Nanotechnol. 2018, 9, 954–962, doi:10.3762/bjnano.9.89

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Figure 1: Cross-sectional (top) and top-view (bottom) SEM images of tilted Al columns deposited at an inciden...

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Figure 2: (a) Calculated in-plane pole figures for the cubic Al{200} and (b) Al{111} planes in a vertically (...

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Figure 3: Schematic illustration of a tilted Al column deposited on a thermally oxidized Si substrate at an o...

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Figure 4: Cross-sectional SEM images of tilted metallic columns deposited at an incidence angle of 82° on the...

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Figure 5: Column tilt angles of (a) low-melting metals Al, Ni and (b) high-melting metals Ta, Mo and Cr depos...

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Figure 6: β_θ=90°-values for Ta, Mo and Al columns depending on the homologous temperature (for explanation se...

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Figure 7: Porosity of (a) Ta, Mo and Cr and (b) Ni and Al thin films versus incidence angle.

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Published 22 Mar 2018

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